Parameter
Reference data
Vibraon severity†
Single-phase pumps
Three-phase pumps
Class 1C
Class 1C
* Measured at ulmate vacuum 1 metre from the end of the pump to ISO 11201, High
Vacuum mode
S
, 50 Hz operaon.
† Measured at the inlet port to ISO 2372 (1974).
3.2.5 Lubricaon data
Note:
Edwards Material Safety Data sheets for the rotary pump oils are available on request.
Table 10
Lubricaon data
Parameter
Reference data
RV3 RV5 RV8 RV12
Recommended oil*
Hydrocarbon-prepared pumps Ultragrade 19
PFPE-prepared pumps Krytox 1506 or Fomblin 06/6
Oil capacity
Maximum 0.70 litres 0.70 litres 0.75 litres 1.00 litres
Minimum 0.42 litres 0.42 litres 0.45 litres 0.65 litres
* To operate the pump when the ambient temperature is outside the limits specied in Operang and
storage condions on page 13, or to opmise the pump performance when pumping condensable
vapours, a dierent oil may be needed.
03/2021 - ©Edwards Limited
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A65201880_AA - Technical data