Name: Edwards RV3
Brand: Edwards
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5.1.2 Gas purges

WARNING:

If using inert gas purges to dilute dangerous gases to a safe level, ensure that the

pump is shut down if an inert gas supply fails.

WARNING:

Obey the instrucons and take note of the precauons given below to ensure that

pumped gases do not enter their ammable ranges.

Switch on the inert gas purge to remove air from the pump and the exhaust pipeline

before the process starts. Switch o the purge ow at the end of the process only aer

any remaining ammable gases or vapours have been purged from the pump and

exhaust pipeline.

If liquids that produce ammable vapours could be present in the pump foreline, then

the inert gas purge to the pump should be le on all the me this liquid is present.

Flammable liquids could be present in the foreline as a result of condensaon or may be

carried over from the process.

When calculang the ow rate of inert gas required for diluon, consider the maximum

ow rate for the ammable gases/vapours that could occur. For example, if a mass ow

controller is used to supply ammable gases to the process, assume a ow rate for

ammable gases that could arise if the mass ow controller is fully open.

Connually measure the inert gas purge ow rate: if the ow rate falls below that

required, stop the ow of ammable gases or vapours into the pump.

Note:

We recommend obtaining and reading the Vacuum Pump and Vacuum System Safety

manual (publicaon number P40040100), available from us or the supplier.

5.2 How to use the pump controls

5.2.1 Introducon

Use the mode selector (Figure: The RV pump, item 11) and the gas-ballast control

(Figure: The RV pump, item 5) to opmise the performance of the RV pump for the

applicaon. The performance characteriscs of the pump with the dierent control

sengs are shown in Table: Performance data- High Vacuum mode and Table:

Performance data- High throughput mode. The posion of both the mode selector and

the gas-ballast control can be changed when the pump is o or when the pump is

operang.

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A65201880_AA - Operaon

Edwards RV3 Instruction Manual

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