Edwards STP-451C - 13 Specifications and Accessories; Specifications of the STP Pump; Table 13.1 Specifications of the STP Pump

STP-301/451 Series Instruction Manual
13-1
Specification
13 Specifications and Accessories
13.1 Specifications of the STP Pump
Table 13.1 Specifications of the STP Pump
Item STP-301 series STP-451 series
Inlet port flange ICF152/VG100/ISO100 ICF203/VG150/ISO160
Flange size
*1
Outlet port flange KF25
N
2
L/s 300 480
He L/s 280 460
Pumping speed
*2
H
2
L/s 300 460
N
2
>10
8
He 5 × 10
5
Compression ratio
H
2
2 × 10
4
Without anti-corrosion
treatment
10
-8
(10
-10
)
6.5 × 10
-6
(5 × 10
-8
)
: ICF flange
: VG/ISO flange Ultimate pressure
Pa (Torr)
Chemical specific type
10
-7
(10
-9
)
6.5 × 10
-6
(5 × 10
-8
)
: ICF flange
: VG/ISO flange
Maximum working pressure Pa (Torr) 6.7 × 10
-2
(5 × 10
-4
) : Natural air cooling
Allowable backing pressure Pa (Torr) 13 (0.1) : Natural air cooling
Flow rate of purge gas Pa•m
3
/
s
(SCCM)
1.7×10
-2
（10）
Rated speed rpm 25,000 to 48,000
Starting time min 3
Stopping time min 3
Vibration
μm O-P
<0.01 (at 48,000 rpm)
Noise dB <50 (at 48,000 rpm)
Baking temperature
°C
<120
Lubricating oil Not necessary
Installation position Free
Cooling method
Natural air cooling
(Water/air cooling: for baking/gas suction)
Standard backing pump L/min 240
Mass kg 11 12
Dimensions mm
φ180×230 φ180×200
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
- 25 to + 55
The values shown in the table are typical; they are not guaranteed.
*1
:ICF (JVIA standard), VG, KF (JIS)
*2
: At 48,000 rpm. The performance varies with the rated speed