STP-301/451 Series Instruction Manual
4-13
Installation
Piping at the Inlet Port Flange
Attach the inlet port to the high vacuum side.
Maximum working pressure: See Table 13.1,"STP Pump specifications"
Pressure at the inlet port flange
applicable continuously
(for natural air cooled)
Piping at the Outlet Port Flange
Attach the outlet port to the inlet port flange of the backing pump
(primary side pump).
Allowable backing pressure: See Table 13.1,"STP Pump specifications"
Pressure at the outlet port flange
applicable continuously
(for natural air cooled)
◇ To attain the ultimate pressure shown in Table 13.1,"STP Pump specifications," set
the pressure at the outlet port flange to 1.3 Pa (10
-2
Torr).
4.3.5 Connecting the Ground Cable
Connect the ground cable (yellow/green) between the ground terminal of the STP pump and
the ground terminal of the STP control unit.
When the resistance between the ground terminals is lower than 0.1 ohms, it is not
necessary to connect the ground cable after installing the STP pump and the STP control
unit.
◇ When the resistance between the ground terminals is over 0.1 ohms, always
connect the ground cable.
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