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STP-451C
Edwards STP-451C User Manual
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STP-301/451 Series Instruction Manual
13-8
注意
!
CAUTION
!
Turbomorecular pump Control Unit
SER
IA
L N
o.
:
MODEL: S
CU-
MA
NU
FA
CT
UR
IN
G
D
A
TE
:
WEIGHT:
kg
MANUFACT
URED B
Y: Edwar
ds Jap
an Lim
ited.
107
8-1, Yos
hihash
i, Yac
hiyo-shi
, Chib
a, Japa
n
CE
Figure 13.5
Label Affixing Positions for the STP Control Unit
115
117
Table of Contents
Limited Warranty
9
Table of Contents
10
Precautions for Safe Operation of the STP Pump
15
Usable Gases
15
Precautions on Maintenance and Inspection
15
Labels
16
Operation Principle of the STP Pump
19
Figure 2.1 Cross Sectional View of the STP Pump
20
Unpacking
21
Unpacking the STP Pump and the STP Control Unit
21
Accessories
21
Table 3.1 Accessories
21
Table 3.2 Accessories for Chemical Specific Pump (Type C)
21
Installation of the STP Pump
23
Name and Function of each Part
23
Figure 4.1 Configuration of the STP Pump
24
Precautions before Installation
25
Operating Environment
25
Installation Area
26
Bench
26
How to Install the STP Pump
27
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
STP Pump Installation Positions
29
Figure 4.3 STP Pump Installation Positions
29
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
How to Secure the STP Pump
30
Table 4.1 Tightening Torque of Bolt
30
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
31
Figure 4.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)
31
Table 4.3 Number of Claw Clamps by Size of Flange
32
Figure 4.6 Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)
32
Figure 4.7 Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)
33
Vacuum Piping
34
Connecting the Ground Cable
35
Connecting the Purge Port (for the Chemical Specific Pump, Type C)
36
Figure 4.8 Connecting the Purge Port
36
Baking, Cooling the STP Pump and Gas Pumping
37
Baking the STP Pump
37
Attaching a Baking Heater
37
Cooling the STP Pump
38
Water Cooling Method
38
Air Cooling Method
39
Gas Pumping
40
How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)]
40
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater
41
Installation of the STP Control Unit
43
Name and Function of each Part
43
Front Panel
43
Figure 6.1 STP Control Unit Front Panel
44
Rear Panel
45
Figure 6.2 STP Control Unit Rear Panel
46
Top Panel
47
Figure 6.3 STP Control Unit Top Panel
47
Side Panel (Left)
48
Figure 6.4 STP Control Unit Side Panel (Left)
48
Precautions before Installation
49
Operating Environment
49
Insulation Test
49
Installation Area
50
Figure 6.5 Peripheral Spaces of the STP Control Unit
50
Attaching the STP Control Unit Front Panel to a Rack
51
Figure 6.6 Example of Securing the STP Control Unit
51
Cable Connection
52
Name and Dimensions of each Cable
52
Figure 6.7 External Dimensions of Ground Cable
52
Figure 6.8 External Dimensions of STP Connection Cable
52
Figure 6.9 External Dimensions of STP Connection Cable
53
How to Connect the Cables
54
Table 6.1 Connecting the Power Cable
55
Figure 6.10 Connecting Method of the AC Power Cable
55
Figure 6.11 How to Secure the Power Cable
56
Connecting to Semiconductor Equipment
57
Connecting to Power
57
Emergency off Circuit (EMO Circuit)
57
How to Start/Stop the STP Pump
59
Before Starting
59
Start Procedures
60
Stop Procedures
60
Manual Operation
61
Powering on
61
Starting the STP Pump
61
Stopping the STP Pump
61
Starting the STP Pump after Stopping
62
Powering off
62
Starting the STP Pump after a Safety Function Operates
62
Remote Operation (I/O TB2)
63
Powering on
63
Starting/Stopping the STP Pump
63
Starting the STP Pump after Stopping
63
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (I/O TB2)
63
Powering off
64
Starting the STP Pump after a Safety Function Operates
64
Table 7.2 Reset Operation During Remote Operation (I/O TB2)
64
Remote Operation (CON4: Optional Accessory)
65
Powering on
65
Starting/Stopping the STP Pump
65
Starting the STP Pump after Stopping
65
Table 7.3 Starting/Stopping the STP Pump During Remote Operation (CON4)
65
Powering off
66
Starting the STP Pump after a Safety Function Operates
66
Table 7.4 Reset Operation During Remote Operation (CON4)
66
Figure 7.1 STP Pump Operation Procedures
67
Remote Input/Output Signal Terminal Blocks
69
I/O TB1 Terminal Block
69
Table 8.1 I/O TB1 Terminal Block
69
Figure 8.1 I/O TB1 Remote Output Signal Terminal Block
71
I/O TB2 Terminal Block
73
Table 8.4 I/O TB2 Terminal Block
73
Figure 8.2 I/O TB2 Remote Input Signal Terminal Block
74
CON4 Connector (Optional Accessory)
75
Remote Input Signals
75
Table 8.5 CON4 Connector (Remote Input Signal)
75
Figure 8.3 CON4 Remote Input Signal Connector
76
Remote Output Signals
77
Table 8.7 con 4 Connector (Remote Output Signal)
77
Figure 8.4 CON4 Remote Output Signal Connector
78
Remote Cables (Optional Accessories)
79
Table 8.9 Remote Cable Connections (Single-Side Connector Type)
79
Adjustment Method
81
Tuning
81
Tuning Method
81
Figure 9.1 Tuning Procedures
82
Setting the Rated Speed
83
When Setting DSW-B No. 1 to on under Power-ON State
83
When Setting DSW-B No. 1 to on before Powering on
84
Figure 9.2 LCD Message in Rated Speed Setting Mode
85
10 Safety Functions
87
Power Failure
87
Table 10.1 States of Lamps and REMOTE Output Signals at Power Failure
88
Table 10.2 Operations of the STP Pump after Power Recovery
88
Abnormal State of Magnetic Bearing
89
Excessive Vibration
89
Motor Driver Overload
89
Overheating Inside the STP Pump
89
Overheating Inside the STP Control Unit
89
Overspeed
89
11 Troubleshooting, Maintenance and Inspection
93
Troubleshooting Immediately after an Abnormality/Error Occurs
93
In Case of a Power Failure
93
In Other Cases
93
When Error Message Is Displayed
94
Error Messages
94
Table 11.1 Error Messages
95
Displaying Past Abnormalities/Errors and Accumulated Running-Time
97
Abnormalities When Powering on
99
Abnormalities When Performing the STP Pump Start Operation
99
Table 11.2 Troubleshooting after Powering on
99
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation
99
Other Abnormalities
100
Table 11.4 Troubleshooting While the STP Pump Is Rotating
100
Maintenance and Inspection
101
Inspecting the Air Cooling Fan
101
Replacing the Fuses
102
Table 11.5 Recommended Spare Parts
102
Cleaning and Decontamination
103
Inspecting for Deposit
103
Table 11.6 Cleaning and Decontamination
103
Overhaul
104
Transporting for Repair or Overhaul
105
12 Storage and Disposal
107
Storage of the STP Pump
107
Storage of the STP Control Unit
107
Disposal
108
13 Specifications and Accessories
109
Specifications of the STP Pump
109
Table 13.1 Specifications of the STP Pump
109
Figure 13.1 External Appearance of the STP Pump [Without Anti-Corrosion Treatment]
110
Figure 13.2 External Appearance of the STP Pump [Chemical Specific Type C]
111
Figure 13.3 Label Affixing Position for the STP Pump
112
Specifications of the STP Control Unit
113
Table 13.2 Specifications of the STP Control Unit
113
Safety Functions
114
Figure 13.4 External Appearance of the the STP Control Unit
115
Figure 13.5 Label Affixing Positions for the STP Control Unit
116
4
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Edwards STP-451C Specifications
General
Brand
Edwards
Model
STP-451C
Category
Water Pump
Language
English
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