Edwards STP-451C

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STP-301/451 Series Instruction Manual

11-6

Troubleshooting

The version of the STP pump is displayed on the LCD immediately after the main breaker is

switched "ON".

< LCD Message>

Main breaker “ON”

SELFTEST

***** ver.*.**

LEVITATION

TEST COMPLETE

Version

Main Page

Limited Warranty9
Table of Contents10
Precautions for Safe Operation of the STP Pump15
Usable Gases15
Precautions on Maintenance and Inspection15
Labels16
Operation Principle of the STP Pump19
Figure 2.1 Cross Sectional View of the STP Pump20
Unpacking21
Unpacking the STP Pump and the STP Control Unit21
Accessories21
Table 3.1 Accessories21
Table 3.2 Accessories for Chemical Specific Pump (Type C)21
Installation of the STP Pump23
Name and Function of each Part23
Figure 4.1 Configuration of the STP Pump24
Precautions before Installation25
Operating Environment25
Installation Area26
Bench26
How to Install the STP Pump27
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment27
Cleaning the Seal28
STP Pump Installation Positions29
Figure 4.3 STP Pump Installation Positions29
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump29
How to Secure the STP Pump30
Table 4.1 Tightening Torque of Bolt30
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange31
Figure 4.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)31
Table 4.3 Number of Claw Clamps by Size of Flange32
Figure 4.6 Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)32
Figure 4.7 Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)33
Vacuum Piping34
Connecting the Ground Cable35
Connecting the Purge Port (for the Chemical Specific Pump, Type C)36
Figure 4.8 Connecting the Purge Port36
Baking, Cooling the STP Pump and Gas Pumping37
Baking the STP Pump37
Attaching a Baking Heater37
Cooling the STP Pump38
Water Cooling Method38
Air Cooling Method39
Gas Pumping40
How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)]40
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater41
Installation of the STP Control Unit43
Name and Function of each Part43
Front Panel43
Figure 6.1 STP Control Unit Front Panel44
Rear Panel45
Figure 6.2 STP Control Unit Rear Panel46
Top Panel47
Figure 6.3 STP Control Unit Top Panel47
Side Panel (Left)48
Figure 6.4 STP Control Unit Side Panel (Left)48
Precautions before Installation49
Operating Environment49
Insulation Test49
Installation Area50
Figure 6.5 Peripheral Spaces of the STP Control Unit50
Attaching the STP Control Unit Front Panel to a Rack51
Figure 6.6 Example of Securing the STP Control Unit51
Cable Connection52
Name and Dimensions of each Cable52
Figure 6.7 External Dimensions of Ground Cable52
Figure 6.8 External Dimensions of STP Connection Cable52
Figure 6.9 External Dimensions of STP Connection Cable53
How to Connect the Cables54
Table 6.1 Connecting the Power Cable55
Figure 6.10 Connecting Method of the AC Power Cable55
Figure 6.11 How to Secure the Power Cable56
Connecting to Semiconductor Equipment57
Connecting to Power57
Emergency off Circuit (EMO Circuit)57
How to Start/Stop the STP Pump59
Before Starting59
Start Procedures60
Stop Procedures60
Manual Operation61
Powering on61
Starting the STP Pump61
Stopping the STP Pump61
Starting the STP Pump after Stopping62
Powering off62
Starting the STP Pump after a Safety Function Operates62
Remote Operation (I/O TB2)63
Powering on63
Starting/Stopping the STP Pump63
Starting the STP Pump after Stopping63
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (I/O TB2)63
Powering off64
Starting the STP Pump after a Safety Function Operates64
Table 7.2 Reset Operation During Remote Operation (I/O TB2)64
Remote Operation (CON4: Optional Accessory)65
Powering on65
Starting/Stopping the STP Pump65
Starting the STP Pump after Stopping65
Table 7.3 Starting/Stopping the STP Pump During Remote Operation (CON4)65
Powering off66
Starting the STP Pump after a Safety Function Operates66
Table 7.4 Reset Operation During Remote Operation (CON4)66
Figure 7.1 STP Pump Operation Procedures67
Remote Input/Output Signal Terminal Blocks69
I/O TB1 Terminal Block69
Table 8.1 I/O TB1 Terminal Block69
Figure 8.1 I/O TB1 Remote Output Signal Terminal Block71
I/O TB2 Terminal Block73
Table 8.4 I/O TB2 Terminal Block73
Figure 8.2 I/O TB2 Remote Input Signal Terminal Block74
CON4 Connector (Optional Accessory)75
Remote Input Signals75
Table 8.5 CON4 Connector (Remote Input Signal)75
Figure 8.3 CON4 Remote Input Signal Connector76
Remote Output Signals77
Table 8.7 con 4 Connector (Remote Output Signal)77
Figure 8.4 CON4 Remote Output Signal Connector78
Remote Cables (Optional Accessories)79
Table 8.9 Remote Cable Connections (Single-Side Connector Type)79
Adjustment Method81
Tuning81
Tuning Method81
Figure 9.1 Tuning Procedures82
Setting the Rated Speed83
When Setting DSW-B No. 1 to on under Power-ON State83
When Setting DSW-B No. 1 to on before Powering on84
Figure 9.2 LCD Message in Rated Speed Setting Mode85
10 Safety Functions87
Power Failure87
Table 10.1 States of Lamps and REMOTE Output Signals at Power Failure88
Table 10.2 Operations of the STP Pump after Power Recovery88
Abnormal State of Magnetic Bearing89
Excessive Vibration89
Motor Driver Overload89
Overheating Inside the STP Pump89
Overheating Inside the STP Control Unit89
Overspeed89
11 Troubleshooting, Maintenance and Inspection93
Troubleshooting Immediately after an Abnormality/Error Occurs93
In Case of a Power Failure93
In Other Cases93
When Error Message Is Displayed94
Error Messages94
Table 11.1 Error Messages95
Displaying Past Abnormalities/Errors and Accumulated Running-Time97
Abnormalities When Powering on99
Abnormalities When Performing the STP Pump Start Operation99
Table 11.2 Troubleshooting after Powering on99
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation99
Other Abnormalities100
Table 11.4 Troubleshooting While the STP Pump Is Rotating100
Maintenance and Inspection101
Inspecting the Air Cooling Fan101
Replacing the Fuses102
Table 11.5 Recommended Spare Parts102
Cleaning and Decontamination103
Inspecting for Deposit103
Table 11.6 Cleaning and Decontamination103
Overhaul104
Transporting for Repair or Overhaul105
12 Storage and Disposal107
Storage of the STP Pump107
Storage of the STP Control Unit107
Disposal108
13 Specifications and Accessories109
Specifications of the STP Pump109
Table 13.1 Specifications of the STP Pump109
Figure 13.1 External Appearance of the STP Pump [Without Anti-Corrosion Treatment]110
Figure 13.2 External Appearance of the STP Pump [Chemical Specific Type C]111
Figure 13.3 Label Affixing Position for the STP Pump112
Specifications of the STP Control Unit113
Table 13.2 Specifications of the STP Control Unit113
Safety Functions114
Figure 13.4 External Appearance of the the STP Control Unit115
Figure 13.5 Label Affixing Positions for the STP Control Unit116

Edwards STP-451C - Page 98

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