Edwards STP-L301 Series

STP-L301/L451 Series Instruction Manual
13
FIGURES
Figure 2.1 Cross Sectional View of the STP Pump ..................................................................2-2
Figure 4.1 Configuration of the STP Pump...............................................................................4-2
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment.........................................4-5
Figure 4.3 STP Pump Installation Positions .............................................................................4-7
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump .....4-7
Figure 4.5 Example of Securing the STP Pump
(When Securing the Inlet Port with Bolts)................................................................4-9
Figure 4.6 Example of Securing the STP Pump
(When Securing the Inlet Port Flange with Claw Clamps).....................................4-10
Figure 4.7 Example of Securing the STP Pump
(When Installing the Damper in the Inlet Port Flange)...........................................4-11
Figure 4.8 Connecting the Purge Port ....................................................................................4-14
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater.....................................5-5
Figure 6.1 STP Control Unit Front Panel..................................................................................6-2
Figure 6.2 STP Control Unit Rear Panel ..................................................................................6-4
Figure 6.3 STP Control Unit Top Panel ....................................................................................6-5
Figure 6.4 STP Control Unit Side Panel (Left side) ..................................................................6-6
Figure 6.5 Peripheral Spaces of the STP Control Unit .............................................................6-8
Figure 6.6 Example of Securing the STP Control Unit .............................................................6-9
Figure 6.7 External Dimensions of Ground Cable ..................................................................6-10
Figure 6.8 External Dimensions of STP Connection Cable ....................................................6-10
Figure 6.9 External Dimensions of STP Connection Cable ....................................................6-11
Figure 6.10 Connecting Method of the AC Power Cable..........................................................6-13
Figure 6.11 How to Secure the Power Cable ...........................................................................6-14
Figure 7.1 STP Pump Operation Procedures...........................................................................7-9
Figure 8.1 I/O TB1 Remote Output Signal Terminal Block .......................................................8-3
Figure 8.2 I/O TB2 Remote Input Signal Terminal Block..........................................................8-6
Figure 8.3 CON4 Remote Input Signal Connector ...................................................................8-8
Figure 8.4 CON4 Remote Output Signal Connector...............................................................8-10
Figure 9.1 Tuning Procedures..................................................................................................9-2
Figure 9.2 LCD Message in Rated Speed Setting Mode..........................................................9-5
Figure 13.1 External Appearance of the STP Pump STP (STP-L301: ISO100) .......................13-2
Figure 13.2 External Appearance of the STP Pump (STP-L451: ISO160) ...............................13-3
Figure 13.3 Label Affixing Position for the STP Pump .............................................................13-4
Figure 13.4 External Appearance of the STP Control Unit .......................................................13-7
Figure 13.5 Label Affixing Positions for the STP Control Unit ..................................................13-8