Edwards STP-L301 Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 145
7
SAFETY FUNCTIONS
Referred
Section
5.2.5
3.11
*1
Valid only with TMS specification
Table 46 - Error List (continued)
Countermeasures
1.
Send a communication command periodically at
intervals of less than
2.
Check the communication cable.
3.
Contact Service office.
Contact Service office.
Overhaul is needed
.
Contact Service office.
1.
Connect the electromagnetic cooling water valve correctly. Check the volume of water and water temperature.
2.
Contact Service office.
Probable causes
1.
Insufficient user application setting.
2.
Disconnection or break of the communication cable.
3.
Failure of the control unit.
Failure of the
control unit.
Frequency of "Disturbance"
or
"
Power Failure" error.
1.
Cooling failure of TMS unit.
2.
Failure of TMS unit.
Occurrence
condition
Communication
failure of the input
operation port
during
acceleration
and
normal operation
Abnormal rotatinal
speed detection
Damage point
excees setting
value
TMS temperature
control error
(when the TMS
unit
detection
temperature
becomes higher
than t
he setting
value by 10°C
(+18 ºF)
or more.
Pump operation
D
ecelerate and
stop
D
ecelerate and
stop
D
ecelerate and
stop
D
ecelerate and
stop
(Error message)
Serial Com. Fail
Speed Pulse Lost
START NOT
ALLOWED
TMS Higher
Temp
*1
"FAILURE"
LED
Steady red

Edwards STP-L301 Series Specifications

General

Brand	Edwards
Model	STP-L301 Series
Category	Water Pump
Language	English