STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 145
7
SAFETY FUNCTIONS
Referred
Section
Valid only with TMS specification
Table 46 - Error List (continued)
Countermeasures
Send a communication
command periodically at
Check the communication
cable.
Contact Service office.
.
Connect the
electromagnetic cooling
water valve correctly.
Check the volume of water
and water temperature.
Contact Service office.
Probable causes
Insufficient user
application setting.
Disconnection or break of
the communication cable.
Failure of the control unit.
control unit.
Frequency of "Disturbance"
Power Failure" error.
Cooling failure of TMS unit.
Failure of TMS unit.
Occurrence
condition
and
detection
he setting
or more.
Pump operation
ecelerate and
ecelerate and
ecelerate and
ecelerate and
(Error message)
*1
"FAILURE"
LED
Steady red