Tilted Sample/Lost Light
Samples with nonplanar surfaces scatter some of the light away from the collection optics. This
option automatically compensates for the light lost due to nonplanarity.
Lock Identical Layers
Samples comprised of repeating layers can be more accurately measured by activating this option.
By activating these options, all properties of any layers that initially have the same material or thick-
ness are locked together.
Display Details
When solving for n and k, the values displayed in the Results Summary box of the Measure Tab
will be the values determined for the wavelength entered here.
Enable Robust (Adaptive; Thickness Only)
If thickness of a single-layer film is the only property to be measured and the film is greater than
150 nm, then the Robust (Adaptive;Thickness Only) mode is often recommended. This mode
can oftentimes result in successful measurements when the reflectance data is affected by non-ideal
film properties, such as thickness and composition non-uniformities and birefringence. The range
of thicknesses tested is constrained by the limits set in the Constraints field in the Film Stack tab.
Selecting this feature will limit the Analysis Options tab settings available.
Enable FFT (Thickness Only)
If thickness is the only property to be measured and the film is greater than about 250 nm, then the
FFT (Thickness Only) mode can be used. This mode is usually the most effective technique when
the sample has multiple film thicknesses to be measured. Selecting this feature will limit the Anal-
ysis Options tab settings available.
To Next Page
Loading...
Need help?
General
