4-7. Layout diagram of Y unit sensor
Y-axis origin sensor (part No.: HD00057000A)
Y minus limit detection (part No.: 40045713)
Y plus limit detection (part No.: 40045713)
Chuck close detection M (part No.: HD00057000A)
Chuck open detection M (part No.: HD00057000A)
Tray pulled-out detection (+) (part No.: HA001310000)
4-7
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