• Source/Monitor Terminals
Source/monitor unit, SMU, can simultaneously perform DC voltage or current output
and measurement. Typical SMU has the Force, Guard, Sense, and Circuit Common
terminals as shown below. Normally the Force, Guard, and Sense terminals are the
same potential. Voltage marked around the terminals indicates the Protection Limits.
Force and Sense must be connected to a terminal of a device under test for the Kelvin
connection which is effective for high current measurement and low resistance
measurement. For the non-Kelvin connection to ease the connections, connect Force
only. Do not connect Sense. It must be opened.
Guard should be extended to around the device terminal for reducing leakage current
caused by a coaxial cable used. Guard must be never connected to anything at the
device side.
Circuit Common should be connected to shielding of the coaxial cable used.
The following image is the Kelvin triaxial connector of High Power SMU.
Force
Sense
Guard
Circuit Common
Guard
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