13 300781172_002_C0 - 01/2019 - © Leybold
Specifications and configurations
Operating temperature
range
Ø
10 - 40 °C
Operating humidity range
††
15 - 80% (not condensing)
Communication cable Cat5e (Straight, with shield, maximum length = 100 m
Communication spec
¤
Ethernet (TCP/IP ver4)
*
Sensitivity when the SEM voltage is set at -3 kV. Normally, use at 500 mA/mbar or less
§
The initial value is 0.5 mA.
‡
Under standard operating condition (Temperature: 10 - 40 °C. Humidity: 15 - 80%), maximum baking temperature
when the sensor unit is connected is 200 °C. For higher temperature baking between 200 and 250 °C, make sure
to maintain surrounding temperature less than 25 °C and humidity at
15 - 80%. If the temperature and/or humidity of the sensor unit increases, the resolution will change and the mass
number will change. Adjust resolution and calibrate the mass number when temperature and humidity are stable.
†
A power thermistor is used to prevent surge currents. Wait until the sensor unit cools before turning on power
again.
#
Analogue inputs and partial pressure/total pressure set-points are effective when dedicated software is used for
connection. START input is effective in the local mode.
Ø
If the temperature and/or humidity change, resolution will change and the mass number will change. Adjust
resolution and calibrate mass number when temperature and humidity are stable.
¤
TCP / IP communication can be used only with on wired connection with a Windows PC with dedicated software
installed. Only Windows PC devices are supported.
Series LEYSPEC view LEYSPEC ultra
Model
LEYSPEC
view100
LEYSPEC
view100S
LEYSPEC
view200
LEYSPEC
view200S
LEYSPEC
ultra 200S
LEYSPEC
ultra 300S
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