300781172_002_C0 - 012/2019 - © Leybold 12
Specifications and configurations
2 Specifications and configurations
2.1 Technical data and specifications
Series LEYSPEC view LEYSPEC ultra
Model
LEYSPEC
view100
LEYSPEC
view100S
LEYSPEC
view200
LEYSPEC
view200S
LEYSPEC
ultra 200S
LEYSPEC
ultra 300S
Mass Number Range (amu) 1 - 100 1 - 200 1 - 300
Resolution (M/∆M) M/ΔM=1M (10% P.H.)
Mass Spectrometer Quadrupole type (QMS)
Detector FC FC/SEM FC FC/SEM FC/SEM FC/SEM
Sensitivity (A/mbar) 1e-5 400
*
1e-5 400
‡
FC:2.5e-4A
@1.0mA
SEM:400
‡
FC:2.0e-4A
@1.0mA
SEM:400
‡
Minimum detectable partial
pressure (mbar)
e-10 e-14 e-10 e-14 FC: e-12 order
SEM: e-11 order
Max. operating pressure
(mbar)
1e-4
Total pressure
measurement
Yes
Total pressure
measurement range
1e-4 - e-7 mbar order
Linearity (mbar) -
Ion source B-A type with total pressure measurement function
Filament Ir/Y
2
O
3
Ionization voltage (eV) 50 25 - 70
Emission current (mA) 0.5 0.05/0.5/1.0
§
Degassing Electron bombard 330 V, 5 mA
Voltage applied to SEM (kV) - -1.0 to -3.0 - -1.0 to -3.0 -1.0 to -3.0
Max. baking temperature
(when sensor unit is
connected)
120 °C 250 °C
‡
Max. baking temperature
(when sensor unit is
disconnected)
250 °C 300 °C
Power requirements (V) 24 V d.c. ±10%
Power consumption (W) 50 W
Ripple & noise (Vp-p) Less 240 mV
Rush current
†
8.5 (room temperature 25 °C at cold start)
Power connector MSTB2.5V/3-GF-5.08
External I/O connector
#
D-SUB 15-pin (M2.6 screw)
Communication connector RJ45 female
Fuse 6.3 A
Weight (analyzer tube) (kg) 0.55 0.64 0.55 0.64 0.81
Weight (sensor unit) (kg) 2.1 (without SEM)
2.2(with SEM)
2.4
IP protection class IP30 (sensor unit)
To Next Page
Loading...
Need help?
General
