75 300781172_002_C0 - 01/2019 - © Leybold
Troubleshooting
12 Troubleshooting
Refer to the following tables for troubleshooting.
Make sure the power is off before troubleshooting.
CAUTION:
Make sure the power is off.
Error Cause Remedy
POWER LED on the sensor unit does
not come on when power is turned on
Power connector is
disconnected
Check the power inlet connector.
Power cable is broken. Check the power cord lines for continuity and
insulation using a circuit tester or other.
Line voltage is out of
specification.
Check line voltage using a circuit tester or other (line
voltage: 24 V d.c. ± 10%).
Fuse in the rear panel is
open.
Turn the fuse box with a screwdriver, take out the
fuse and check continuity using a circuit tester. If the
fuse has blown out and its cause is a momentary
over-current, replacement of the fuse will resolve the
problem, but if other cause is responsible for the
over-current, the fuse will burn out again. Locate the
real cause from other items.
The power line in the sensor
unit is disconnected.
Power line in the sensor unit (inline filter, wiring,
power switch, transformer, switching power supply,
and so forth) is disconnected or short-circuit. See
your closest service representative for repair and
inspection.
Measurement does not start when
you press the START button (FIL error
lights up)
Filament was burned out. Check continuity between filament electrodes using
a circuit tester or other. If the filament is burned out,
change it over to the other one using the included
software. However, if the filament is burned out due
to operation above the measurement pressure range
for an extended time, the analyzer tube interior could
have been contaminated. In this case, the emission
current may not be normal even if the other filament
has continuity. In that case, replace the ion source.
Poor insulation between
electrodes of the analyzer
tube.
Remove the sensor unit, check the pin assignment
inside the analyzer tube, and then check the
insulation between the electrodes of the analyzer
tube and the outer wall using a circuit tester and so
forth. If there is poor insulation, ship the analyzer
tube back for repair.
Pressure is high. Check pressure by a vacuum gauge.
Insufficient power capacity. Use 24 V d.c., 2 A power or more.
Contamination of the
analyzer tube or filament
worn out.
Replace the analyzer tube using the spare part listed
in the consumable parts table.
Measurement does not start by
pressing the START button (SEM error
lights up)
Secondary electron multiplier
(SEM) is in contact with earth
or other electrode.
Check continuity between electrodes using a circuit
tester or other. If there is continuity, remove the
analyzer tube and eliminate the cause of contact.
Insufficient power capacity. Use 24 V d.c., 2 A power or more.
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