71 300781172_002_C0 - 01/2019 - © Leybold
Maintenance
10.The SEM voltage adjusts automatically until ion current reaches the target. If the
target current is a long way from the actual current, it can take a long time to
calibrate. If calibration is taking a long time, stop the measurement and manually
increase SEM voltage.
When the current reaches the target value, a dialog box appears.
11.To check the display value in local mode, change the DIP switch setting and
perform the operation in the local mode.
11.4 Replacing the secondary electron multiplier (SEM)
For replacement of the SEM tube, contact your local service representative.
11.5 Consumable parts list
Item Ordering No. Applicable model Timing of replacement
Ion source D05001013 LEYSPEC view100 Filament burnout, ion source contamination or
sensitivity decrease.
LEYSPEC view100S
LEYSPEC view200
LEYSPEC view200S
Analyzer tube D05001016 LEYSPEC view100 Analyzer tube contamination, sensitivity decrease
or abnormal waveform.
LEYSPEC view200
Analyzer tube D05001015 LEYSPEC view100S Analyzer tube contamination, sensitivity decrease
or abnormal waveform.
LEYSPEC view200S
Filament D05002014 LEYSPEC ultra 200 Filament burnout.
LEYSPEC ultra 300S
Ion source D05002013 LEYSPEC ultra 200 Filament burnout, ion source contamination or
sensitivity decrease.
LEYSPEC ultra 300S
Analyzer tube D05002015 LEYSPEC ultra 200 Analyzer tube contamination, sensitivity decrease
or abnormal waveform.
LEYSPEC ultra 300S
Secondary electron
multiplier (SEM)
D05002013 LEYSPEC view-S Sensitivity decrease.
LEYSPEC ultra -S