300781172_002_C0 - 012/2019 - © Leybold 22
Installation
4 Installation
4.1 Preparation
1. Make sure power is off.
2. Unpack the product and check quantities.
3. Check for damage.
4.2 Installation
4.2.1 Install the analyzer tube
1. Measuring position
This product measures pressure by measuring the static pressure in the
position where the analyzer tube is connected. Take care in selecting the
measuring position because the measurement value is affected if there is a
flow in the vacuum system, source of out-gas or source of high intensity
electrons or ions.
The correct pressure measurement cannot be made or the analyzer tube
may fail if the analyzer tube is subject to vibration, heat radiation, high
intensity electromagnetic field or high intensity radiation.
The RGA must be connected to power supplies or instruments that conform
to the requirements of a grounded protective extra-low voltage (SELV-E
according to EN 61010).
Keep enough room around the unit as to not cover panel vents and allow for
sufficient heat dissipation.
2. Installing the analyzer tube
Install the analyzer tube so that the aperture plane of the analyzer tube is
installed in parallel to the flow of gas. Especially, see to it that gas is not
introduced into the analyzer tube in a beam form. Also make sure that
foreign objects cannot fall into the analyzer tube by installing a mesh if the
aperture faces up.
If you touch the gasket with bare hands or use a contaminated gasket it can
cause measurement errors. Use a new gasket and, before use, wipe it with a
clean cloth wetted with alcohol. To avoid leaks, never reuse gaskets.
If the filament is subjected to strong lateral impact or vibration when it is hot,
it may break or contact the grid electrode.
If the analyzer tube is connected at the end of a long or thin pipe, the
pressure in the analyzer tube will increase because of the reduced
conductance. This can cause measurement errors or filament burnout.
As indicated in Front panel buttons and displays on page 17, fix the
analytical tube after paying attention to the orientation of the operation panel