3 300781172_002_C0 - 01/2019 - © Leybold
Contents
Page
0 Before using this instrument 5
0.1 Safety symbols 5
0.2 Safety precautions 5
1 Introduction 11
1.1 Compliance statements 11
2 Specifications and configurations 12
2.1 Technical data and specifications 12
2.2 Standard configuration 14
3 Buttons and connections 17
3.1 Front panel buttons and displays 17
3.2 Rear panel 18
3.3 EXT-I/O connector 19
3.4 DIP switch 20
4 Installation 22
4.1 Preparation 22
4.2 Installation 22
5 Turning on (supplying power) 28
6 Operation 29
6.1 Measurement with software (remote) 29
6.2 Measurement with the sensor unit (Local mode) 30
7 Front panel operation 31
7.1 Operating and error states 31
7.2 If pressure is lower than measurement range 32
7.3 If filament fault has occurred 32
7.4 If RF fault has occurred 33
7.5 If secondary electron multiplier (SEM) fault has occurred 33
7.6 If interlock signal is input and total pressure interlock in on 33
8 External inputs and outputs (I/O) 35
8.1 Pressure and error outputs 35
8.2 Interlock input 35
8.3 Analogue input 36
9 Cautions in operation 37
9.1 Operating pressure range 37
9.2 Degassing 37
9.3 Secondary electron multiplier (SEM) tube 37
9.4 Baking 39
9.5 Calibration 40
9.6 Converting to partial pressure 42
9.7 Storage 43
10 Options 44
10.1 AC adaptor 44
10.2 USB 3.0 wired LAN adaptor 47
10.3 Switching hub 47
11 Maintenance 51
11.1 Life expectancy of the ion source 51
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