300781172_002_C0 - 01/2019 - © Leybold 4
Contents
Page
11.2 Replace consumable components 51
11.3 Calibrate 57
11.4 Replacing the secondary electron multiplier (SEM) 71
11.5 Consumable parts list 71
11.6 List of Materials 72
12 Troubleshooting 75
13 Appendix 78
13.1 Theory of operation 78
13.2 Principles of operation 78
13.3 Handling of quadrupole spectrometer 81
13.4 Interpretation of measurement value 81
13.5 Peaks of major residual gases 83
13.6 Setting the IP address of the sensor unit 84
13.7 Set up the RGA PC network 86
14 Return the equipment or components for service 91
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