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LEYSPEC view Series
LEYBOLD LEYSPEC view Series User Manual
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27
300781172_002_C0
- 01/2019 - © Leybold
Installation
Fig.
4.5
Connection b
etween PC and
multiple sensor
units
PC
LAN connector
LAN cable
Sensor unit
Switching hub
Sensor unit
(maximum 16 un
its)
26
28
Table of Contents
Table of Contents
3
Before Using this Instrument
5
Safety Symbols
5
Safety Precautions
5
Introduction
11
Compliance Statements
11
Specifications and Configurations
12
Technical Data and Specifications
12
Standard Configuration
14
Buttons and Connections
17
Front Panel Buttons and Displays
17
Rear Panel
18
EXT-I/O Connector
19
DIP Switch
20
Installation
22
Preparation
22
Turning on (Supplying Power)
28
Operation
29
Measurement with Software (Remote)
29
Measurement with the Sensor Unit (Local Mode)
30
Front Panel Operation
31
Operating and Error States
31
If Pressure Is Lower than Measurement Range
32
If Filament Fault Has Occurred
32
If RF Fault Has Occurred
33
If Secondary Electron Multiplier (SEM) Fault Has Occurred
33
If Interlock Signal Is Input and Total Pressure Interlock in on
33
External Inputs and Outputs (I/O)
35
Pressure and Error Outputs
35
Interlock Input
35
Analogue Input
36
Cautions in Operation
37
Operating Pressure Range
37
Degassing
37
Secondary Electron Multiplier (SEM) Tube
37
Baking
39
Calibration
40
Converting to Partial Pressure
42
Storage
43
Options
44
AC Adaptor
44
USB 3.0 Wired LAN Adaptor
47
Switching Hub
47
Maintenance
51
Life Expectancy of the Ion Source
51
Replace Consumable Components
51
Calibrate
57
Replacing the Secondary Electron Multiplier (SEM)
71
Consumable Parts List
71
List of Materials
72
Troubleshooting
75
Appendix
78
Theory of Operation
78
Principles of Operation
78
Handling of Quadrupole Spectrometer
81
Interpretation of Measurement Value
81
Peaks of Major Residual Gases
83
Setting the IP Address of the Sensor Unit
84
Set up the RGA PC Network
86
Return the Equipment or Components for Service
91
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LEYBOLD LEYSPEC view Series Specifications
General
Brand
LEYBOLD
Model
LEYSPEC view Series
Category
Measuring Instruments
Language
English
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