Head
GA10218_0101 - 5/2002
⏐ 15
1.3.4 Technical Data PhoeniXL
300 Modul
1.3.4.1 Technical Data
To get down to the minimum detected leak rate range some conditions
must be fulfilled:
PhoeniXL has to run at least 20 minutes
Ambient conditions must be stable (temperature, no vibration/accelera-
tions.)
The part under test has been evacuated long enough without using the
zero function (background is no longer decreasing)
ZERO must be active
1.3.4.2 Electrical Data
Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates
in vacuum mode
– with Scroll pump
≤ 8·10
-12
mbar l / s
– with oil sealed pump
≤ 5·10
-12
mbar l / s
in sniffer mode
<1·10
-7
mbar l / s
Minimum detectable Hydrogen leak rates
in vacuum mode
≤ 1·10
-8
mbar l / s
in sniffer mode
< 1·10
-7
mbar l / s
Maximum Helium leak rate which can be displayed 0.1 mbar l / s
Measurement range 12 decades
Time constant of the leak rate signal (blanked off,
63% of the final value)
< 1 s
Pumping speed (Helium) at the inlet
– GROSS mode 1,0 l / s
– FINE mode > 2.5 l / s
Detectable masses 2, 3 and 4
Mass spectrometer 180° magnetic sector
field
Ion source 2 filaments;
Iridium/Yttria-oxide
Inlet port DN 25 KF
Run-up time (after starting) ≤ 2min
Power supply 100V ...230 V,
50/60 HZ
Power consumption 350 VA
Type of protection IP40
Power cords (EU, USA, UK) 2.5 m
To Next Page
Loading...
