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2
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GA10218_0102 - 6/2002
Table of Contents
1 General Information ........................................................................................8
1.1 Notes on the Use of this Handbook .................................................................... 8
1.1.1 Safety Symbols .................................................................................................. 8
1.1.2 Indications .......................................................................................................... 8
1.1.3 Symbols of Vacuum Technology ........................................................................ 8
1.1.4 Definiton of Terms .............................................................................................. 9
1.2 Support from LEYBOLD Service ....................................................................... 10
1.3 Introduction ...................................................................................................... 11
1.3.1 Purpose ........................................................................................................... 11
1.3.2 Technical Data PhoeniXL
300
............................................................................. 12
1.3.2.1 Technical Data ................................................................................................. 12
1.3.2.2 Electrical Data .................................................................................................. 12
1.3.2.3 Other Data ....................................................................................................... 13
1.3.2.4 Ambient Conditions .......................................................................................... 13
1.3.3 Technical Data PhoeniXL
300 dry
........................................................................ 13
1.3.3.1 Technical Data ................................................................................................. 13
1.3.3.2 Electrical Data .................................................................................................. 14
1.3.3.3 Other Data ....................................................................................................... 14
1.3.3.4 Ambient Conditions .......................................................................................... 14
1.3.4 Technical Data PhoeniXL
300 Modul
.................................................................... 15
1.3.4.1 Technical Data ................................................................................................. 15
1.3.4.2 Electrical Data .................................................................................................. 15
1.3.4.3 Other Data ....................................................................................................... 16
1.3.4.4 Ambient Conditions .......................................................................................... 16
1.4 Unpacking ........................................................................................................ 16
1.4.1 Supplied Equipment ......................................................................................... 16
1.4.2 Accessories and Options .................................................................................. 17
1.4.2.1 Sniffer line SL300 ............................................................................................. 17
1.4.2.2 Remote control ................................................................................................ 18
1.4.2.3 Partial flow system (PhoeniXL
300
only) .............................................................. 18