LEYBOLD PhoeniXL300 - PhoeniXL300 Modul Vacuum System

Head
32 ⏐
GA10218_0101 - 5/2002
4.1.1.2 Vacuum System PhoeniXL
300 Modul
The PhoeniXL
300 Modul
has no roughing pump integrated as the other
models. Therefore it can be used with an external pump only. This pump
can be oil sealed or a dry version with a roughing capacity between 2.5
and 65 m
3
/h. This pump has to be connected to the DN25 KF at the side
or under the bottom of the PhoeniXL
300 Modul
.
Fig. 6 Vacuum diagram PhoeniXL
300 dry
Pos. Description
1 MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2 Turbomolecular Pump (TMP, provides high vacumm conditions in
the MS)
3 Pirani gauge P2 (fore vacuum pressure)
4 Diaphragm pump (provides the foreline pressure for the TMP und
pumps down the parts under test)
5 Inlet Port
6 Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
MS
P
1
V
1
V
2a
V
3
V
2b
P
2
V
V
4 a
4 b
V
6
V
5
V
7
1
2
3
6
5
4
Diaphragm pump