Head
GA10218_0101 - 5/2002
⏐ 33
Fig. 7 Vacuum diagram PhoeniXL
300
Modul
Pos. Description
1 MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2 Turbomolecular Pump (TMP, provides high vacumm conditions in
the MS)
3 Pirani gauge P2 (forevacuum pressure)
4 Fore pressure pump (provides the foreline pressure for the TMP
und pumps down the parts under test)
5Inlet Port
6 Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
MS
P
1
V
1
V
2a
V
3
V
2b
V
6
P
2
V
4a
external pump
V
5
V
7
1
2
4
5
7
6
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