LEYBOLD PhoeniXL300 - Description and Working Principle; PhoeniXL Vacuum System Overview

Head
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GA10218_0101 - 5/2002
4 Description and
Working Principle
4.1 Introduction
The PhoeniXL basically is a helium leak detector for vacuum applications,
i.e. the part under test is evacuated while the test is performed. The
vacuum is achieved with a pumping system that is part of the PhoeniXL.
In addition the vacuum can be generated by pumps which are set up in
parallel to the PhoeniXL.
The PhoeniXL
300 Modul
needs a forevacuum pump, dry or wet version, to
be connected because this unit has no internal roughing pump. The con-
nection (DN25 KF) is on the side or under the bottom of the PhoeniXL
300
Modul
.
Another operating mode of the PhoeniXL is the Sniffer mode which can
only be used when a sniffer line (See Chapter 1.4.2) is hooked up.
4.1.1 Vacuum System PhoeniXL
300
The vacuum diagram below shows the major components inside the
PhoeniXL
300
:
Fig. 5 Vacuum diagram PhoeniXL
300
Pos. Description
1 MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2 Turbomolecular Pump (TMP, provides high vacumm conditions in
the MS)
3 Pirani gauge P2 (fore vacuum pressure)
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