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GA10218_0101 - 5/2002
remove it to the front.
8. Removing the cover for the electronics section by removing the four
Phillips screws (see Fig. 36/2).
9. Pull the cover over the electronics section back to the rear and place it
aside.
10. After completion of all maintenance work put the electronic cover
back in place and screw it tighten. The cover of the mechanical section
must engage properly in the openings at the bottom.
9.1.3 Exchanging the filter mats
The filter mats have been built in to filter the dust out the air which is taken
in. In order to ensure that the filter mats will not throttle the air flow and so
that sufficient cooling is possible at all times, the filter mats should be cle-
aned or exchanged as soon as these have attained a dark grey colour.
Filter mats are used at three places within the PhoeniXL:
a) at the ventilation slit of the electronic cover (only partly visible from
the outside)
b) on the face side on the back (only partly visible from the outside)
c) at the fan of the turbomolecular pump (only partly visible from the
outside)
To exchange the filter mats remove the covers as described above.
Filter mat a.) these filter mats are srewed to the electronic cover. Unscrew
the screws and exchange the filter mats. (Cat. no. 20099025)
Filter mat b.) This filter mat is located on the side together with a further
metal grid an a recess. It can be exchanged without having to use any
tools. (Cat. no. 20099025)
Filter mat c) This filtermat is fixed before the fan with a plastic bracket.
Take of the bracket and remove the filter, put on the bracket and fix it pro-
perly. (Cat. no. 200001366)
Under certain circumstances a dirty mat may be cleaned by shaking the
dust out or by using a vacuum cleaner so that the filter mat can be used
again.
9.1.4 Exchanging the oil
Remove the cover of the mechanical section as described in Chapter
9.1.2.
Caution Before starting with any disassembly work on the pumps, pull
the mains plug first. When the pump has been pumping hazar-
dous substances, dertermind the kind of hazard first and ensure
that suitable safety precautions are taken.
Observe all safety regulations
Attention When disposing of waste oil you must observe the applicable
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