LEYBOLD PhoeniXL300 - Page 3

Head
GA10218_0102 - 6/2002
⏐ 3
2 Installation ......................................................................................................19
2.1 Working Location ............................................................................................. 19
2.2 Electrical Connections ...................................................................................... 20
2.2.1 Mains Power .................................................................................................... 20
2.2.2 Connections for the Data Acquisition Systems ................................................. 21
2.2.2.1 Option (Accessories) ........................................................................................ 21
2.2.2.2 Digital Out (Control) .......................................................................................... 22
2.2.2.3 Digital In (Control 2) .......................................................................................... 22
2.2.2.4 Recorder .......................................................................................................... 23
2.2.2.5 RS232 .............................................................................................................. 23
2.2.2.6 Remote Control ................................................................................................ 24
2.3 Vaccum Connections ....................................................................................... 24
2.3.1 Inlet Port ........................................................................................................... 24
2.3.2 Exhaust ............................................................................................................ 24
2.3.3 Vent ................................................................................................................. 24
2.3.4 Gas ballast connection ..................................................................................... 24
2.3.5 Connection of an external pump (Only PhoeniXL
300 Modul
) ................................ 25
2.4 Default settings ................................................................................................ 25
3 First Operation Check ...................................................................................27
3.1 Needed Equipment .......................................................................................... 27
3.2 Description of the Initial Operation .................................................................... 27
3.2.1 Startup and Measure ........................................................................................ 27
3.2.2 Internal Calibration ............................................................................................ 28
3.2.3 Verification with an external test leak ................................................................ 29
3.2.4 Measure with a test object ............................................................................... 29
3.2.5 Switch off ......................................................................................................... 29
4 Description and Working Principle ..............................................................30
4.1 Introduction ...................................................................................................... 30
4.1.1 Vacuum System PhoeniXL
300
........................................................................... 30
4.1.1.1 Vacuum System PhoeniXL
300 dry
...................................................................... 31
4.1.1.2 Vacuum System PhoeniXL
300 Modul
.................................................................. 32
4.1.2 Control Panel ................................................................................................... 34
4.1.2.1 LC Display ........................................................................................................ 34