LEYBOLD PhoeniXL300 - Page 7

Head
GA10218_0102 - 6/2002
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7.3 Factor of Calibration - Range of Values ............................................................. 87
8 Error And Warning Messages ......................................................................88
8.1 Hints ................................................................................................................ 88
8.2 List of Errors & Warnings .................................................................................. 88
9 Maintenance ..................................................................................................95
9.1 LEYBOLD Service ............................................................................................ 95
9.1.1 Maintenance Plan ............................................................................................. 95
9.1.2 Opening the PhoeniXL ...................................................................................... 96
9.1.3 Exchanging the filter mats ................................................................................ 97
9.1.4 Exchanging the oil ............................................................................................ 97
9.1.5 Cleaning ........................................................................................................... 98
9.1.6 Exchanging the fuses ....................................................................................... 98
9.1.7 Exhaust Oil filter .............................................................................................. 100
9.2 Turbo molecular pump ................................................................................... 100
9.3 Calibrated leak TL7 ........................................................................................ 100
9.3.1 Tecnical Data ................................................................................................. 101
9.3.2 Factory Inspection .......................................................................................... 101
Appendix ..............................................................................................................102