LEYBOLD TURBOLAB 80 - Page 13

Description
12
300554859_002_C0 - 11/2016 - © Leybold
Vacuum gauge
Gate valve
Flange heater
TURBOVAC
Shut-off valve
Vacuum gauge
Metal hose
Adsorption trap
Backing pump
Exhaust filter
Equipment with accessories
TPU not shown
Fig. 1.4 Schematic diagram of the turbomolecular pump systems TURBOLAB
Shut-off valve
Venting valve or purge gas valve or
purge gas and venting valve
Bypass line
TPU
TURBOVAC
Metal hose
Backing pump
TURBOLAB
with TPU
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