Program settings
109
Setting the hold-
ing time
The holding time is the duration in which the wash block temperature
is kept constant.
...
Holding time
Holding time
)Min
(0 - 15
1 Min
The duration can be set in 1minute increments. The possible range is
shown in the bottom line.
If process chemicals are to be dispensed in this wash block, the hold-
ing time will equal at least the DOS exposure time. It is not possible
to set a lower value.
Use the arrow buttons (higher) and (lower) to set the holding
time.
Press OK to save the setting.