36
4Specication
No. 99MBE011A
(3)
High perfor-
mance oil
mist lter
y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPa
y Proof pressure: 1.5 MPa
y Maximum particle diameter (ltra-
tion): 0.01 µm
y Secondary oil concentration: 0.001
mg/m
3
or below
y Element replacement: One year
(6000 hours) or when pressure is
lowered to 0.1 MPa or lower
-
MX1000-
8-W
(CKD)
(4) Regulator
y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPa
y Proof pressure: 1.5 MPa
y Set pressure range: 0.1 MPa—0.7
MPa
y Oil proof treatment type
-
RA-050-L
(CKD)
(5)
Fixed dia-
phragm
y Fluid: Air
y Used pressure range: 0.1 MPa—0.9
MPa
y Screw tightening torque: 1.0 N・m—
1.5 N・m
y Flow rate at pressure 0.1 MPa:
Approx. 12.7 L/min (per axis)
y Flow rate at pressure 0.2 MPa:
Approx. 19 L/min (per axis)
06ACJ155
PC6-
M5M-0.9
(Pisco cus-
tom order)
(1) to
(4)
Air unit
See the
next gure.
Equivalent to ISO-8573-1 Class 1.4.1
y Maximum particle diameter (ltra-
tion): 0.01 µm
y Lowest pressure dew point: -
y Oil concentration (oil mist concen-
tration): 0.001 mg/m
3
or less
y Flow rate at pressure 0.1 MPa: 12.7
L/min (per axis)
y Insertable ow rate (maximum): 75
L/min
y When to replace each element: One
year
06ACJ154 -
(1) Air lter
(2) Oil mist lter
(3) High performance oil mist lter
(4) Regulator
IN
OUT
(1) (2) (3) (4)
Appearance of air unit