35
4Specication
No. 99MBE011A
Using ow rate adjustable
valves
Make adjustment with the air pressure, so that the air ow becomes 10
L/min—20 L/min (per scale unit).
Make sure not to supply a large amount of air before making ad-
justments. Otherwise, it may cause components to break thereby
resulting in malfunctions.
4.5.3 Air Supply Unit
The specications for recommended air devices and the manufacturer models are described in the
following.
If the specications are the same, you can use air equipment made by another company.
Estimated time of element replacement for each lter is one year.
Air dryer, and
main line air lter
Compressor side
Air device Scale
(1) (2) (3) (5)
(4)
No. Component
Appear-
ance
Specication
Part No.
Part No.
(Mitutoyo)
Manufac-
turer model
(1) Air lter
y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPa
y Proof pressure: 1.5 MPa
y Maximum particle diameter (ltra-
tion): 5 µm
y Secondary oil concentration: -
-
F1000-8-W
(CKD)
(2) Oil mist lter
y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPa
y Proof pressure: 1.5 MPa
y Maximum particle diameter (ltra-
tion): 0.01 µm
y Secondary oil concentration: 0.01
mg/m
3
or below
y Element replacement: One year
(6000 hours) or when pressure is
lowered to 0.1 MPa or lower
-
M1000-8-W
(CKD)