MKS 356 Micro-Ion Plus Series User Manual

Micro-Ion
®
Module Instruction Manual - 356007-GP 71
Index
A
About these instructions 7
Analog output
reading 33
wiring 18
Appendixes
Specifications 67
Automatic filament selection 30
B
Before you begin
about these instructions 7
caution and warning statements 7
reading and following instructions 9
C
Cable 17
Calibration
at atmosphere 23, 35
at vacuum 36
Caution and warning statements 7
CE Mark compliance 12
Chapters
Installation 13
Maintenance 59
RS-485 Operation 25
Control inputs 20
Customer service 9, 59
D
Damage requiring service 59
Data timing and response 42
E
Eliminating radio frequency interference 23
Error responses 57
Explosion / Implosion 8
F
Factory defaults 56
Firmware version 48
Fittings
ConFlat flange 17
NW flange 17
VCR type 17
G
Gauge assembly 66
Ground wiring 22
I
Installation
analog and RS-485 output wiring 18
attach module to vacuum chamber 16
cable connections 17
calibrate at atmosphere 23
ConFlat flange 17
control input wiring 20
eliminating radio frequency interference 23
ground wiring 22
locate module 14
module components 13
module power supply 18
NW flange 17
pressure relief devices 14
procedure 13
trip point relay wiring 21
VCR-type fitting 17
Installation procedure 13
K
Keyboard lock/unlock 55, 56
L
Lethal Voltages 8
M
Maintenance
damage requiring service 59
Micro-Ion gauge continuity test 63
replacing gauge assembly 66
returning a damaged module 66
troubleshooting 60
Materials exposed to gas 12
Micro-Ion gauge
auto OFF 10
auto ON 10
continuity test 63

MKS 356 Micro-Ion Plus Series Specifications

General

Brand	MKS
Model	356 Micro-Ion Plus Series
Category	Control Unit
Language	English