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MKS SENTRY 1510A User Manual

MKS SENTRY 1510A
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Instruction Manual #122162 15
3. Quick Start Guide
If you are familiar with the SENTRY 1510 system and have previously installed the same model, you
may wish to make an additional photocopy of this checklist on clean-room paper and refer to it during the
installation. Review the notes and cautions located throughout the manual prior to installation. However,
if you have not previously installed a SENTRY 1510 system or may have installed a different model, it is
recommended that you read through the installation manual in its entirety first and use the checklist
during actual installation.
3.1 SENTRY 1510 System Installation Checklist
[ ] 1. General
[ ] 1.1. Unpacking: Verify that none of the contents are missing or damaged
[ ] 1.2. Part Names: Review the part names prior to installation.
[ ] 2. Installation Checklist
[ ] 2.1. Copy this checklist onto cleanroom paper and refer to it during installation.
[ ] 3. Guidelines
[ ] 3.1. Review Installation Guidelines
[ ] 3.2. Review Installation Layout
[ ] 4. Installation & Power-Up
[ ] 4.1. SENTRY 1510
[ ] 4.1.1. Mount the SENTRY 1510 to the Process Tool
[ ] 4.1.2. Connect the Furnace Exhaust (No BAI Condenser)
[ ] 4.1.3. Connect the Facilities Exhaust to the SENTRY 1510
[ ] 4.2. Drains and P-Traps
[ ] 4.2.1. Install Drains (as required)
[ ] 4.2.2. Install P-Traps or Tubing Loops (as required)
[ ] 4.2.3. Install Isolation Valves (as required)
[ ] 4.3. Process Pressure Sense Tube
[ ] 4.3.1. Connect the Process Pressure Sense Tube to the Furnace
[ ] 4.3.2. Connect the Proess Pressure Sense Tube to the SENTRY 1510
Care should be taken to avoid pinching or blocking of the sense
line as damage to the SENTRY 1510 Transducer may occur.
[ ] 4.4. SENTRY 1510 Nitrogen Supply
[ ] 4.4.1. Connect the Nitrogen Supply Line to the SENTRY 1510
[ ] 4.5. TIM 100/120
[ ] 4.5.1. Attach the Mounting Brackets to the TIM 100/120
[ ] 4.5.2. Mount the TIM 100/120 to the Tool
[ ] 4.5.3. Ground the TIM 100/120
[ ] 4.6. SENTRY Cable Installation
[ ] 4.6.1. Connect the TIM 100/120 to the SENTRY 1510 Cable
[ ] 4.6.2. Connect the TIM 100/120 Power and/or Tool Interface
[ ] 4.6.3. Connect the Serial Communication Cable (Optional)
[ ] 4.7. System Start-Up
[ ] 4.7.1. Power ON the SENTRY TIM-100/120
[ ] 4.7.2. Select Communication Operating Mode
[ ] 4.7.3. Save Operating Parameter Data
[ ] 4.8. Condenser (Required for Wet Process)

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MKS SENTRY 1510A Specifications

General IconGeneral
BrandMKS
ModelSENTRY 1510A
CategoryControl Unit
LanguageEnglish

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