MKS SENTRY 1510A - Process Pressure Sense Tube Connection

Instruction Manual #122162 24
5.3 Process Pressure Sense Tube
The process pressure sense tube is a 10’ thin walled Teflon tube (OD 0.25”, ID 0.187). One end of
the tube is fitted with a Teflon retainer for securing the tube to the barbed fitting on the SENTRY
1510. The Process pressure sense tube is used to measure the process pressure at the exhaust
output of the process tube. The SENTRY 1510 transducer is factory calibrated with a nitrogen purge
in the sense line to prevent back migration of corrosive vapor, and to evaporate any condensation.
Notice
Be sure the N
2
is OFF and not connected to the SENTRY 1510 Controller
while installing the sense tube. If the sense tube becomes blocked or
pinched even momentarily, the internal pressure transducer can be
damaged.
5.3.1 Connecting the Process Pressure Sense Tube to the Furnace
1. The sense tube should be connected as close to the process chamber exhaust as possible.
2. The quartz to teflon transition fitting previously installed provides a good location for the process
pressure sense tube.
3. The sense line connection should be a Teflon compression fitting suitable to accommodate a
1/4” OD. Tube mounted 90 degrees to the exhaust flow.
Notice
The SENTRY 1510 is factory calibrated using a 10-foot sense line. The sense
line must not be shortened to less than 2 meters. The sense line and the
sense line fitting must never be blocked or pinched. If the sense tube
becomes blocked or pinched even momentarily, the internal pressure
transducer can be damaged.