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MKS SENTRY 1510A User Manual

MKS SENTRY 1510A
56 pages
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Instruction Manual #122162 4
Table of Contents
1. Safety Information ................................................................................................... 5
2. General Description .............................................................................................. 10
2.1 Part Names and Description .............................................................................. 10
3. Quick Start Guide .................................................................................................. 15
3.1 SENTRY 1510 System Installation Checklist ..................................................... 15
4. Guidelines .............................................................................................................. 17
4.1 Installation Guidelines ....................................................................................... 17
4.2 Installation Layout ............................................................................................. 18
5. Installation & Power-Up ........................................................................................ 19
5.1 SENTRY 1510 ................................................................................................... 19
5.2 Drains and P-Traps ........................................................................................... 22
5.3 Process Pressure Sense Tube .......................................................................... 24
5.4 Nitrogen Supply to the SENTRY 1510 ............................................................... 25
5.5 TIM 100/120 Installation .................................................................................... 26
5.6 Power Supply .................................................................................................... 27
5.7 SENTRY Cable Installation ............................................................................... 28
5.8 System Start-Up ................................................................................................ 31
5.9 Condenser (Required for Wet Process) ............................................................. 33
6. Operation ............................................................................................................... 39
6.1 Introduction ....................................................................................................... 39
6.2 Operational Theory ............................................................................................ 39
6.3 Manual (“SINGLE”) Mode Sentry Controller with TIM-100/120 .......................... 41
6.4 Analog Interfaced Operation .............................................................................. 43
6.5 Serial Interfaced Operation ................................................................................ 43
7. Maintenance & Troubleshooting .......................................................................... 44
7.1 Maintenance ...................................................................................................... 44
7.2 Troubleshooting ................................................................................................. 44
8. Appendices ............................................................................................................ 50
8.1 Appendix A: Specifications and Facility Requirements ..................................... 50
8.2 Appendix B: SENTRY 1510 Menu ..................................................................... 51
8.3 Appendix C: Recommended System Grounding ............................................... 52
8.4 Appendix D: Tool/Host to Cable Matrix ............................................................. 53
8.5 Appendix E: Dimensional Drawings .................................................................. 54

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MKS SENTRY 1510A Specifications

General IconGeneral
BrandMKS
ModelSENTRY 1510A
CategoryControl Unit
LanguageEnglish

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