84
Stage
Item
Specifications
STM7-CS50 STM7-CS100 STM7-CS200 STM7-CS300
Stage top size Ø140 mm 210x210 mm 360x360 mm 510x510 mm
Stage glass size Ø100 mm 144x144 mm 249x249 mm 349x349 mm
Measuring range X50mm, Y50 mm X100 mm, Y100 mm X200 mm, Y200 mm X300 mm, Y300 mm
Rotation mechanism 360 °
Measurement accuracy
(L: measuring length)
(3+L/50) μm (3+2L/100) μm (3+4L/200) μm (3+6L/300) μm
Accuracy assurance
weight
5 kg 6 kg 10 kg 15 kg
Dimensions (between
center positions of axes)
427(W)x377(D)x101.5(H)
mm
427(W)x377(D)x87(H)
mm
606(W)x522(D)x108(H)
mm
805(W)x755(D)x108(H)
mm
Weight 18.1 kg 17. 7 kg 59.8 kg 111. 3 kg
· Avoid subjecting the stage to excessively unbalanced load although the applied weight is within the accuracy
assurance weight for it may impair the accuracy.
· Do not place the object heavier than the weight described in Certificate of Accuracy on the stage. The product
may be damaged.
} For the mounting position and size of a tap to clamp a jig on the table, consult your dealer.
Rotatable stage
Item
Specifications
STM7-RS100 STM7-RS200 STM7-RS300
Attachable stage STM7-CS100 STM7-CS200 STM7-CS300
Rotation range 360 °
Stage top size Ø130 Ø230 Ø330
Metal surface size Ø165 mm Ø270 mm Ø370 mm
Accuracy assurance
weight
2 kg 5 kg 7 kg
Dimensions 210(W)x210(D)x30(H) mm 350(W)x300(D)x30(H) mm 440(W)x440(D)x30(H) mm
Weight 2.2 kg 4.4 kg 7. 3 kg