55 XL80 laser system
Linear
XL-80 Hardware
XL-80 Applications
Angular
Straightness
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Figure 4 Linear measurement optical set-up�
With the optics congured as shown above, the sign convention is as follows:
• For positive movement (measurement retroreector moving away from
XL laser) A leads B�
• For negative movement (measurement retroreector moving toward
XL laser) B leads A�
1 XL laser
2 Reference retroreector
3 Linear beam splitter
4 Measurement retroreector
Direction sign convention
4
2
1
Update rate
The quadrature output update rate is 20 MHz�
Accuracy
The transitions of the quadrature signals are accurate to within ±10 nm at low
velocities� However, there is a very small propagation delay (D) between a
change in the optic position and in the quadrature output� The true accuracy
of the transition (ignoring air refraction errors, see below) is given by:
Accuracy = ±(10 + Dv) nm
where v = velocity in m/s
D = 600 nsec
Delays due to any customer interface should be added to D to obtain an
estimate of transition accuracy in a specic application.
Wavelength environmental compensation
The quadrature outputs are not compensated for changes in the refractive
index of air� The value will be subject to variation dependent on environmental
conditions� See XL-80Q operation with RCU10�
3
XL-80 Hardware