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Ulvac LR Series - Page 8

Ulvac LR Series
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vii
Power wiring Installation
Before start work, ensure that all hazardous energies are shut off. Refer to 2.1 For Safety Use.
Wiring work should be performed by licensed workers.
Use the supplied connectors only. If other connectors are used, the first ground contact may fail, and
raise the possibility of electrical shocks.
Stop
The pump is very hot during operation and for some time after it stops
. Contact with it may cause
burn. Feed cooling water for about one hour after the pump is shut down. Never remove the external
panel until the pump cools down.
Contact with electric parts, wiring or others in the panel may cause electric shock. Never run
the
pump with the external panel removed.
Suction and the exhaust pipe are 70 or more
. Remove the protection cover after about one hour
after the pump is shut down.
Power wiring Detaching
There is danger of the electric shock when the breaker (MCB1) is turning on (SEMI S2-
0200 type4).
Please cut off the power supply surely before it detaches it.
Cooling water Detaching
Because cooling water in the pump boils when the collaboration of cooling water is removed
immediately
after the stop of the pump and pressure rises the sensor and piping might be damaged.
Please supply cooling water until the temperature of the pump falls.
The pump is very hot during operation and for some time after it stops. Contact with
it may cause
burn. Feed cooling water for about one hour after the pump shut down.
Close the cooling water supply valve (HWSV). After the valve is closed, tag CLOSE
sign on the
grip.
Through visual flow gauge (HWFM: e.g. flow sight) on the host equipment ensure that flow is shutoff.
When compress air is supplied from
cooling water inlet, the measurement part of the sensor might
be damaged. Please supply compress air from cooling water outlet.
Nitrogen Gas Detaching
Close the nitrogen gas supply valve (HPSV) on the host equipment. After the valve is closed, tag
CLOSE sign on the grip.
Gas will still remain in the host equipment piping. Place pressure gauge on the host equipment
nitrogen supply source (halfway of the
piping to the pump), and ensure that the pressure has already
down within atmospheric pressure.
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