VAT 61228-KAGG-0002 - Installation Space Condition; Connection Overview

Series 612
INSTALLATION
601894EA
Edition 2013-04-12
15/83
4.2.1 Installation space condition
Install the valve with integrated controller with space for dismantling and air circulation
as shown in figure below.
70 mm
4.2.2 Connection overview
System:
M
3
4
5
7
8
2
1
9
6
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable(s)
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 Pump