4.6.3 Valve configuration
Basic valve configuration must be adapted according to application needs.
Definition of valve plate position in case of:
After power up, default is ‘close‘.
Power failure, default is ‘not defined‘. Only for versions that have Power Fail Option equipped [612 . .
- . . C . - . . . . or 612 . . - . . H . - . . . . ].
Network failure, for default settings refer to individual product data sheet.
Local operation:
(‘Control View’, ‘Control Performance Analyzer’
or ‘Service Box 2‘)
Remote operation:
(Refer to chapter «Setup commands» for details)
1. Do power up configuration in menu
‘Setup / Valve’.
1. Send VALVE CONFIGURATION
2. Do power fail configuration in menu
‘Setup / Valve’.
4.6.4 Sensor configuration
Basic sensor configuration must be adapted according to application needs.
ZERO function: This may be ‘disabled’ or ‘enabled’. Default is ‘enabled‘. Refer also to chapter
«ZERO».
Sensor configuration with 1 sensor version [612 . . - . . . G - . . . .].
Local operation:
(‘Control View’, ‘Control Performance Analyzer’
or ‘Service Box 2‘)
Remote operation:
(Refer to chapter «RS232setup commands» for
details)
1. Enable or disable ZERO function in menu
‘Setup / Sensor’.
1. Send SENSOR CONFIGURATION
2. Do 1 sensor configuration in menu ‘Setup
/ Sensor’.
4.6.5 ZERO
ZERO allows for the compensation of the sensor offset voltage.
When ZERO is performed the current value at the sensor input is equated to pressure zero. In case of a 2
sensor system both sensor inputs will be adjusted. A max. offset voltage of +/- 1.4 V can be
compensated. The offset value can be read via local and remote operation.
Local operation:
(‘Control View’, ‘Control Performance Analyzer’
or ‘Service Box 2‘)
Remote operation:
(Refer to chapter «RS232 with analog output
control commands» resp. «RS232 with analog
output setup commands» for details)
Go to menu ‘Zero / ZERO’ and follow
instructions.
2. Wait until process chamber is evacuated and
sensor signal is not shifting anymore.