1.6.2 Valve unit
1 × 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20 C
Cycles until first service
2’000’000 (unheated and under clean conditions)
Admissible operating temperature
Any.
Control unit for ISO-KF version needs support when mounted on
horizontal piping and control unit does not hang.
Aluminium AA6082 (3.2315)
Aluminium AA6082 (3.2315)
Stainless steel 316L (1.4404 or 1.4435 )
- Plate screws
- Rotary feedthrough seals atmosphere side
Stainless steel 316L (A4)
FKM (e.g. Viton®)
- Rotary feedthrough seals vacuum side
- Slide bearing for shaft
Max. differential pressure on plate
Min. controllable conductance (C
min
)
[N
2
molecular flow]
Conductance in open position [N
2
molecular
flow]
Refer to dimensional drawing of specific valve ordering number
(available on request)