VAT 613 Series

INSTALLATION Series
613
56/149 Edition 12.08.2022
984360EC
5.12.7.5 Pressure Sensor
Sub Group Parameter ID [hex] Data Type Acc NV Unit Min Max Description
Actual Pressure 12100000 FLOAT RO V mbar*
Zero Adjust Sensor Selection 12040100 SINT8 RW V 0 2 0:Sensor 1 + 2
1:Sensor 1
2:Sensor 2
3: none
Target Pressure
12040300
FLOAT
RW
V
mbar*
Typically 0.0 when the chamber is fully pumped
down.
Execute 12040400 SINT8 RW V 1 2 1:Execute Zero Adjust
2:Clear Offset Value
Sensor 1
xx = 01
Sensor 2
xx = 02
Available
12xx0100
BOOL
RW
NV
0
1
There is a sensor at this port
Enable
12xx0200
BOOL
RW
NV
0
1
Used to build
Actual Pressure
,
used
for pressure
control
Input Source 12xx0600 SINT8 RW NV 0 2 0:Analog
1:Digital
2:Simulation
Range
Data Unit
12xx0301
SINT8
RW
NV
0
7
0:Pa
1:kPa
2:bar
3:mbar
4:Torr
5:mTorr
6:psia
7:psig
Upper Limit Data Value 12xx0302 FLOAT RW NV see
Data
Unit
Define the range of the of the pressure sensor. E.g.:
100 mTorr sensor:
Data Type: mTorr
Upper Limit Data Value = 100.
Lower Limit Data Value = 0
Lower Limit Data Value 12xx0303 FLOAT RW NV see
Data
Unit
Upper Limit Voltage
Value
12xx0304 FLOAT RW NV Volt
Defines the voltage range of the sensor
E.g.: 0..10V
Lower Limit Voltage
Value
12xx0305
FLOAT
RW
NV
V
olt
Voltage Per Decade 12010311 FLOAT RW NV Volt E.g.: Logarithmic Sensor
with 1000Torr SFS at 9.0V
and 1V/Decade:
Upper Limit Data Value = 1000
Upper Limit Voltage Value = 9
Voltage Per Decade = 1
Scale 12xx0310 SINT8 RW NV 0 1
0:Linear
1:Logarithmic
Zero Adjust
Enable
12xx0401
BOOL
RW
NV
0
1
Offset Value [SFS]
12xx0402
FLOAT
RW
NV
SFS
Value 1.0 means sensor full scale. For example for
a 0-10 Volt gauge the value 0.1 means 1 Volt
Filter
Enable
12xx0501
BOOL
RW
NV
0
1
Time 12xx0502 FLOAT RW NV sec 0 1
Analog Sensor
Input
Value 12xx1101 FLOAT RO V mbar*
Digital Sensor
Input
Value 12xx100A FLOAT RW V mbar*
Value 12xx0A00 FLOAT RO V mbar*
Pressure value of the sensor
Crossover Crossover Mode 12050100 SINT8 RW NV 0 2
Transition method between the sensors
0:Soft Switch → In the transition area a summation
of both pressure signals
1:Hard Switch → Crossover with hysteresis
2:Target Pressure →
During pressure control sensor
is selected depending on Target Pressure, in other
modes Soft Switch is used
Threshold High [SFS
low sensor]
12050300 FLOAT RW NV SFS
of low
sensor
0 1
Defines the transition area respectively the
hysteresis limits.
Threshold Low [SFS
low sensor]
12050200
FLOAT
RW
NV
SFS
of low
sensor
0
1
Delay 12050400 FLOAT RW NV 0.0 10.0 Only relevant in Crossover Mode = Hard Switch
Delay start after reaching the hysteresis limit
General Setting Logarithmic
Pressure
Actual Logarithmic
Value
12A10101 FLOAT RO V
Upper Limit Value
12A10103
FLOAT
RO
V
C
orresponds to the SFS
according to
the sensor
settings
Percent Per Decade 12A10104 FLOAT RW NV %
Defines the logarithmic scaling
Lowest Pressure 12A10107 FLOAT RW NV mbar* Limitation of the lowest pressure if a linear sensor is
connected that become <= 0
Pressure on Interface 12A10105 BOOL RW NV 0:Linear: Linear signal is used on Interface
1:Logarithmic: Logarithmic signal is used on
Interface
Use Logarithmic from
Sensor
12A10106
BOOL
RW
NV
If a logarithmic sensor is connected, the sensor
signal can be used directly.