VAT 613 Series

INSTALLATION Series
613
62/149 Edition 12.08.2022 984360EC
Positon
Set
Resp
Get
Resp
Data
Set, Get
Resp
Description
A: A: aaaaaa Actual Position
C:
C:
Close
O: O: Open
R:
R:
i:38
i:38
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Position Control, a Target Position
H:
H:
Hold
N:
N:
Position Mode (Release Hold)
V: V: i:68 i:68 aaaaaa Speed: 0 - 1000
Pressure Reading
Set
Resp
Get
Resp
Data
Set, Get Resp
Description
P: P: aaaaaaaa Actual Pressure
s:01
s:01
i:01
i:01
abcccccc
Setup
a Sensor Mode
0=No Sensor
1=Sensor1 Only
3=Sensor2 Only
2=Sensor1 High, Sensor2 Low, Crossover Soft Switch
4=Sensor2 High, Sensor1 Low, Crossover Soft Switch
5=Sensor1 High, Sensor2 Low, Crossover High Disabled
6=Sensor2 High, Sensor1 Low, Crossover High Disabled
7=Sensor1 High, Sensor2 Low, Crossover Target Pressure
8=Sensor2 High, Sensor1 Low, Crossover Target Pressure
9=Sensor1 High, Sensor2 Low, Crossover Hard Switch
10=Sensor2 High, Sensor1 Low, Crossover Hard Switch
b Zero Adjust Enable
0=disable, 1=enable
c Sensor Factor
Ratio between the sensors * 100
Example: Sensor 1=1Torr, Sensor 2=100mTorr  c = 010000
Z:
Z:
Zero
i:60 i:60 aaaaaaaa Offset Sensor 1
i:61
i:61
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Offset
Sensor 2
i:62
i:62
aaaabbbb
Offsets: a Sensor 1, b Sensor 2,
range -140 … +150 of 1000
i:64
i:64
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Pressure Sensor 1
i:65 i:65 aaaaaaaa Pressure Sensor 2
c:6002
c:60
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Pressure Alignment, a = Alignment pressure
c:6102
c:61
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Pressure Alignment, a = Alignment pressure
c:90
c:90
aa
Pressure Simulation,
0=Off, 1=On