Toc-2
IM 12B07W01-04EN 1st Edition : Nov. 11, 2016-00
4.3.2 Supplying Chemical Solution to Holding Tank ................................... 4-5
4.3.3 Supplying KCl Solution to Reserve Tank ........................................... 4-6
4.3.4 Adjustment of Pneumatic Pressure ................................................... 4-6
4.3.5 Setting Duration of Forced Feeding of Chemical Solution and Output of
CYLINDER FAIL Signal ..................................................................... 4-7
4.3.6 Supplying Power ................................................................................ 4-7
4.3.7 Entering Data Related to WASH Operation ....................................... 4-7
4.3.8 Verifying WASH Operation ................................................................ 4-8
4.3.9 Calibration with Standard Solution .................................................... 4-8
4.4 Regular Operation ............................................................................................. 4-8
4.4.1 Data Acquisition in Early Stages of Operation ................................... 4-8
4.4.2 Inspections During Regular Operation .............................................. 4-9
4.4.3 Behaviour During Power Failure/Restart ........................................... 4-9
4.4.4 Operation When Shutting Down the System ..................................... 4-9
4.4.5 Procedure When Restarting System Operation .............................. 4-10
5. Inspection and Maintenance ................................................................... 5-1
5.1 Inspection and Maintenance of Operating Unit for PH8SM3 Chemical Cleaning
System ............................................................................................................... 5-1
5.1.1 Inspection of Piping (between chemical cleaning chamber and holder) 5-1
5.1.2 Inspection of Solenoid Valves ............................................................ 5-1
5.1.3 Replacement of Fuses in the Power Supply Box .............................. 5-2
5.2 Inspection and Maintenance of PH8HS3 Holder ........................................... 5-2
5.2.1 Removing Foreign Matter from Wetted Part of Sensor Holder ......... 5-2
5.2.2 Inspecting Gasket on the Bottom Plate of Cleaning Chamber .......... 5-2
5.2.3 Cleaning and Lubricating Pneumatic Cylinder for Driving the Sensor
Holder ................................................................................................. 5-3
5.2.4 Inspecting O-rings on Sensor Holder ................................................ 5-4
5.2.5 Inspecting Terminal Block for Limit Switch ......................................... 5-4
6. Troubleshooting ....................................................................................... 6-1
6.1 More Than 100 ml of Chemical Solution at a Time Is Being Fed to Holder 6-1
6.2 A Smaller Quantity of Chemical Solution Is Fed to Holder .......................... 6-2
6.3 CYLINDER FAIL Signal Appears ..................................................................... 6-2
6.4 When Liquid keeps leaking from bottom plate of Cleaning Chamber ........ 6-2
6.5 Chemical Solution Cannot Be Fed into Cleaning Chamber ......................... 6-3
Customer Maintenance Parts List (PH8SM3).................. CMPL 12B07W01-13E
Customer Maintenance Parts List (PH8HS3)....................CMPL 12B07W01-23E
Revision Record .......................................................................................................i
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