Brooks VX TopCooler - Page 19

Brooks Automation 3. Operation
Part Number: 606325 Rev. A
DuringnormaloperationtheTopCoolerremainscloseduntilawafercoolcycleisrequired.Tocoola
wafer,thePoppetisopenedandahotwaferisplacedonthewafershelfofthepoppet.Thepoppet
isclosed,loweringthewaferontothechillplateandafixedquantityofgasisdischargedintothe
closedcoolchamber.Afterafixedperiodoftime,thegasisremovedandthepoppetisopened
allowingremovalofthecoolwafer.PressuresensingoftheTopCoolerisperformedbytheTMC
monitoringthepressureswitch,whichindicatesthepressurestatesinsideofthecooler.Thisgauge
hastwooutputs,LOWandHI,thatindicatelowandhighpressure.
Thereisnowafersensorinthismodule.Also,thereisnopositionindicationonthevalvessotheir
positionisverifiedbythesystemresponseasindicatedbythepressureswitch’shighandlow
programmedbits.
TheTopCoolerpoppetislocateddirectlybelowtheLiftBar.Toraisethepoppet,thePOPPET
RAISEpneumaticcontrolisasserteduntilthePOPPETUPsignaltransitionsfrom0to1.Tolower
thepoppet,thePOPPETLOWERpneumaticcontrolisasserteduntilthePOPPETDOWNsignal
becomestrue.
Bothoperationsshouldbesubjecttoatime-outconditionforerrorchecking.
TheChargingValveandtheBackfillInitiationValvearediaphragmvalveswhichopenwhenthe
signalisassertedandclosedwhenthesignalisreleased.
TheRoughOutValveisaNW-16poppetvalveandtracksthesingleopen/closedstate.Referto
Figure3-2.
Copyright © 2023, Brooks Automation, Inc.
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