Brooks VX TopCooler - Selecting the Cooling Gas

3. Operation VX TopCooler
Selecting the Cooling Gas Part Number: 606325 Rev. A
Thefollowinginformationwillassistindeterminingthistime:
l
Gaspressure(theinletpressuremustbe20psigtomaintain20Torrinthecooler)
l
TemperatureofwaferenteringtheTopCoolerchamber
Thefollowingvariablesmustbedefinedandsetbytheusertocreateinterlocks.
l
Timeperiodtocoolawafer
l
Timeperiodinwhichrampingmustwait
l
Timeperiodinwhichroughingmustwait
l
Excessivetemperature
l
PressureswitchconnectedtoHI/LOWinputdevicemonitorspressuretodetectsuccessorfailureofall
operations
l
StateofTopCooler(ramping,cooling,roughing,idle)
l
PressurestateofTopCooler
Selecting the Cooling Gas
TheTopCoolerrequiresapproximately20Torrofgaspressure.Argonisusedwithhighvacuum
systemsduetoitshighpumpingspeed;Argonhasalowthermalconductivitytherebymakingitless
effectiveinheatconduction.Argonisalsoanoblegasandisinvisibletochemicalreactions.
22
Copyright © 2023, Brooks Automation, Inc.