Brooks VX TopCooler - Troubleshooting; Initial Troubleshooting

5. Troubleshooting VX TopCooler
Initial Troubleshooting Part Number: 606325 Rev. A
5. Troubleshooting
Initial Troubleshooting
Symptom Possible Cause
Suggested
Solution
TopCoolerleaks Bellowsoro-ringleak
"TopCoolerPop-
petBellows
Replacement"
onpage33

"TopCooler
ChuckO-Ring
Replacement"
onpage36
Waferhasmovedaftercoolcycle
Poppetspeedtoohigh("1.PoppetSpeedTooHigh")
Roughpoppetmotion("2.RoughPoppetMotion")
Processgaspressuretoohigh("8.PressureAdjustment")
Mainchamberpressurerisesduringcool
cycle
Leakypoppeto-ring("3.LeakyPoppetO-Ring")
Coolchamberpressuredoesnotriseduring
coolcycle
Insufficientprocessgaspressure("8.PressureAdjustment")
Leakypoppeto-ring("3.LeakyPoppetO-Ring")
Valve(s)notresponding
Controlboardproblem("4.ControlBoardProblems")
Othervalveproblems("5.OtherCausesforInoperativeGas
Valves")
Wafernotcooling
Insufficientprocessgaspressure("8.PressureAdjustment")
Coolingwateroutofspec.("6.CoolingWaterOutofSpe-
cification")
Mainchambertoohot("7.MainChamberTooHot")
Table 5-1: Initial Troubleshooting

Eachpossiblecauseinthechartiscrossreferencedtoanumberedprocedureinthissection.After
locatingaprobleminthechart,refertothesectionlistedformoredetailedinformation.
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