Brooks VX TopCooler - Introduction

Brooks Automation 1. Introduction
Part Number: 606325 Rev. A
1. Introduction
TheBrooksAutomationTopCooler™offersmaximumperformancewithminimumcomplexity
throughadrop-ininterfaceintotheTransportChamber.Simplifiedgasassistedcoolingandno
onboardcontrolelectronicsfurtheraddtominimumcomplexity.Easyaccessisprovidedtoall
serviceableareas,suchasthecoolplate,whencleaningisnecessary.
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Figure 1-1: TopCooler Overview
Annotation Description
A CoolChuckAssembly
B ChargeValves
C CoolGasConnection
D PoppetAssembly
TheTopCoolerisasimple,highlyefficient,gas-assistedwafercoolingchambercontrolledbyfive
bitsofdigitalI/OconnecteddirectlytotheTransportModuleController.TheTopCoolerisdesigned
Copyright © 2023, Brooks Automation, Inc.
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