Brooks VX TopCooler - Operation

3. Operation VX TopCooler
Part Number: 606325 Rev. A
3. Operation
TheTopCooler™isdirectlycontrolledbytheTMCthroughdiscreteinputsandoutputs.Thesystem
softwarerunningontheTMCisalsoresponsibleforallinterlockinganderrorhandling.
Figure 3-1: Drop-in TopCooler
Annotation Description
A PoppetAssembly
B CoolingChuckAssembly
C CoolGas(Argon)Connection
D DigitalPressureSwitch
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