Brooks VX TopCooler - Table of Contents

VX TopCooler
Revision History Part Number: 606325 Rev. A
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Table of Contents
RevisionHistory 5
1.Introduction 7
ProcessOverview 8
BlockDiagram 8
CoolChamberCover 9
CoolTray 9
TopCoolerVacuumandVent 9
TopCoolerPneumatics 9
Repair 9
2.Safety 10
ExplanationofHazardsandAlerts 11
SafetyText 11
SafetyIcons 11
SignalWordsandColor 11
AlertExample 12
GeneralSafetyConsiderations 13
MechanicalHazards 15
EnvironmentalInformation 16
RecyclingandHazardousMaterials 16
3.Operation 18
NormalCoolingCycleOperation 20
InitialState 20
LoadWaferSequence 20
MeteringofGasCharge 21
CoolingCycle 21
Roughout 21
WaferUnload 21
SettingtheCoolingCycleTime 21
SelectingtheCoolingGas 22
4.MaintenanceandRepair 23
PreventativeMaintenance 23
Parts 24
TopCoolerCoolChuckCleaning 24
O-RingRemoval/Replacement/Cleaning 27
TopCoolerReplacement 30
TopCoolerPoppetBellowsReplacement 33
TopCoolerChuckO-RingReplacement 36
TopCoolerPoppetSpeedAdjustment 39
TopCoolerPoppetOpen/CloseSensorAdjustment 42
5.Troubleshooting 44
InitialTroubleshooting 44
6.FieldReplaceableUnits 47
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